1.Reference Spheres (B) ,with f/numbers f/0.75 ,PV<0.03μm(λ/20,@632.8nm) 2.Transmission Flat(A),working dia. D=Φ60mm,PV<0.03μm(λ/20,@632.8nm) 3.Reference Flat (B) , working dia. D=Φ60mm,PV<0.03μm(λ/20,@632.8nm) 4.Optical Collimation System —— working diaD=Φ60mm,focal length f=200mm 5.Light Source ——————— Laser ZN180(HE-NE) |